Testing Pressure Sensors

A Danish pump manufacturer wanted to incorporate wafer level functional test into their production process. The MEMUNITY team worked with the customer to develop a special Pressure Probe Module for tests up to 7 bar which, when built onto a Fully Automatic Probe System, enabled them to not only have an analytical capability but also enabled automated batch testing overnight and throughout weekends.

Pressure testing up to 50 Bar

The PAP200 is the world's first pressure chamber prober and is capable of testing in a controlled environment from vacuum up to 50 bar.

The system is as versatile and easy to handle as a standard analytical system and includes a simple semiautomatic prober stage which can be pulled out for loading and for adjusting the manipulators. Once pushed in, the door is sealed and the wafer is tested automatically.

The test possibilities of the PAP200 are endless. If so desired, the chamber can be filled with a non-aggressive or toxic gas via special flanges in the walls. When equipped with a thermal chuck, it can perform tests from –40°C to +160°C. By using a vacuum pump and control system the chamber can also be evacuated down to a rough vacuum of 1 mbar. Humidity can also be controlled from 0% to 85% and the user can choose whether tests need to be performed in darkness or whether to add light as part of the test environment. Additionally it can be used to test special microsystems containing both pressure and inertial sensors when an acceleration chuck is used within the chamber. With special wafer frames the system is able also to test diced wafers on blue foil. Needless to say, the prober can also simply be used as a standard analytical prober without extra functions when desired.