Motion Analysis

Some MEMS such as RF devices or micro mirrors require electrical stimulation coupled with motion analysis. Depending on the device this can be undertaken on a standard prober or within a vacuum chamber.

A Laser Doppler Vibrometer scans the device full field and maps the response of the specimen on broad band electrical or mechanical excitation by the prober. High precision PZT stages move the laser spot across the device under test with a lateral resolution down to 1µm and up to 40,000 measurement points. The out-of-plane displacement resolution is in the picometer range at a bandwidth of up to 20MHz.This results in highly accurate operational deflection shapes directly animated on the video image in 3D and a set of FRF for FEM validation and modal analysis without post processing.

Scalable from just single point measurements for checking the resonance frequency in milliseconds up to a complete 3D characterization by adding stroboscopic video microscopy for in-plane displacement measurements, the Polytec microscope based vibration measurements systems of the MSV and MMA series have been developed to fit perfectly onto any SUSS probe station.