SUSS MicroTec (formerly Karl SUSS) is a supplier of production and process technology for the semiconductor and related industries. SUSS MicroTec primarily services emerging markets, which are currently converting to new technologies thereby ensuring their continued ability to compete. For more than 10 years SUSS MicroTec has successfully developed equipment for MEMS processing. With Spin Coaters and Mask Aligners for imaging, Lift-off Tools for essential material processing, Substrate Bonders for mounting, Probers for testing, and Device Bonders for assembling SUSS provides the most influential range of production equipment for MEMS processing and testing. SUSS maintains its leadership position with over 7,000 systems installed worldwide. Headquartered in Munich, Germany, SUSS MicroTec has locations around the globe to serve its customers. Its Test Systems division is based in Dresden Germany and works with direct sales and service centers as well as representatives throughout the world.

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DELTA is among Europe's leading international test, design, service, consulting and education organizations in the field of electronics, software technology, optics and acoustics. DELTA's staff of 270 employees - of which more than one half holds academic degrees - service customers in more than 20 countries from eight accredited laboratories in Denmark, Norway, Sweden, and UK. International collaboration with top university research centers in Europe, and with companies which are strong on the R&D front represents a vital element in DELTA's endeavors to maintain and increase its fund of experience and extend its R&D contact network. DELTA's microsystem department counts 12 people who concentrate our efforts on taking the microsystem chip from chip to reliable product. We are involved in all the phases of the product from the first ideas to the production phase. Our core competencies are test, encapsulation, and qualification.

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Polytec GmbH has been providing world class high-tech solutions for the microstructure, data storage, automotive, aerospace, transportation and steel industries as well as the mechanical engineering and scientific research markets for decades. Polytec is known throughout the world for its market leadership in the design and manufacture of laser-based vibration and speed & length measurement instruments.

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The Fraunhofer-Gesellschaft undertakes applied research of direct utility to private and public enterprise and of wide benefit to society. Its services are solicited by customers and contractual partners in industry, the service sector and public administration. The Fraunhofer Institute for Reliability and Microintegration IZM is one of the leading experts on microelectronics and micro systems packaging worldwide. Besides of packaging, the department Micro devices and Equipment is engaged in the development of Micro Electro Mechanical Systems (MEMS) and advanced technologies and equipment for their fabrication. MEMS test methods have been developed and are applied for characterization of first samples from research and development as well as for production for many years. Different sophisticated test techniques like scanning force microscopy, electronic speckle interferometer, confocal laser microscopy and scanning Laser Doppler Interferometer are available. The development of methods to determine material parameters and geometry of MEMS devices on base of measured frequency transfer function to derive information for process control of MEMS fabrication is in the focus of present work.

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