Accelleration Chuck

A German consortium is developing accelerometers which they want to test prior to packaging. Applying acceleration during test requires vibrating the wafer and part of the test set-up or, alternatively, tilting it in the earth’s gravitational field. MEMUNITY developed a solution for 1 and 5 g vertical acceleration utilizing a vibration chuck. The chucks have a frequency range up to approximately 2 kHz.

Experiments have shown that the electrical contact to the bond pads is stable and reliable even when vibration from the chuck is combined with resonance's in the probes and in the prober.